Design, Fabrication and Integration of a Multi Sensor Chip

Dabbiru, L., Banerjee, M., & Bhattacharya, P. (2004). Design, Fabrication and Integration of a Multi Sensor Chip. Proceedings of the National Conference on Integrating Practice into Engineering Education. Dearborn, MI.

This paper presents our work towards the integration of a multi sensor chip (MSC) with wireless communication. Five different forms of sensors have been designed and fabricated on two separate silicon chips measuring pressure, ambient light, temperature, vibration, sound and chemical environment, powered by a micro Li-ion battery. The millimeter-sized Multi Sensor Chip is made up of microsensors, two batteries and smart interfaces like micro controller unit, A/D converter. The MSC processes the data, and stores it in memory. The Multisensor chip is run by a microcontroller that not only determines the tasks performed, but controls power to the various components of the system.